JPH0734333Y2 - 角度測定装置 - Google Patents

角度測定装置

Info

Publication number
JPH0734333Y2
JPH0734333Y2 JP1989082614U JP8261489U JPH0734333Y2 JP H0734333 Y2 JPH0734333 Y2 JP H0734333Y2 JP 1989082614 U JP1989082614 U JP 1989082614U JP 8261489 U JP8261489 U JP 8261489U JP H0734333 Y2 JPH0734333 Y2 JP H0734333Y2
Authority
JP
Japan
Prior art keywords
rotary
measuring device
slit
angle
line width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989082614U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0321714U (en]
Inventor
春雄 白幡
具祥 徳永
昭 安武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1989082614U priority Critical patent/JPH0734333Y2/ja
Publication of JPH0321714U publication Critical patent/JPH0321714U/ja
Application granted granted Critical
Publication of JPH0734333Y2 publication Critical patent/JPH0734333Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)
JP1989082614U 1989-07-13 1989-07-13 角度測定装置 Expired - Lifetime JPH0734333Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989082614U JPH0734333Y2 (ja) 1989-07-13 1989-07-13 角度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989082614U JPH0734333Y2 (ja) 1989-07-13 1989-07-13 角度測定装置

Publications (2)

Publication Number Publication Date
JPH0321714U JPH0321714U (en]) 1991-03-05
JPH0734333Y2 true JPH0734333Y2 (ja) 1995-08-02

Family

ID=31629589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989082614U Expired - Lifetime JPH0734333Y2 (ja) 1989-07-13 1989-07-13 角度測定装置

Country Status (1)

Country Link
JP (1) JPH0734333Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4827435A (en) * 1986-11-12 1989-05-02 Westinghouse Electric Corp. Blade pitch measurement apparatus and method

Also Published As

Publication number Publication date
JPH0321714U (en]) 1991-03-05

Similar Documents

Publication Publication Date Title
US3989385A (en) Part locating, mask alignment and mask alignment verification system
DE69028518D1 (de) Verfahren sowie gerät zur messung der schichtanordnung in einem halbleiter-wafer
JPH07239716A (ja) 位置検出装置、補正機能付位置検出装置、位置検出方法、および、位置検出装置の補正方法
CN110617785A (zh) 基于调制周期光电检测的转盘偏心误差测量方法
JPH0734333Y2 (ja) 角度測定装置
JPH0263162B2 (en])
JP3480192B2 (ja) Ｘｙステージの位置決め装置
JP3014499B2 (ja) 位置情報検出装置およびそれを用いた転写装置
JP3444800B2 (ja) チルトステージ
JPH0612488Y2 (ja) 角度測定装置
JPH05203429A (ja) 偏心測定方法
CN102566286A (zh) 提高旋转台精度的方法
JPH085767A (ja) 駆動テーブル
JP2777931B2 (ja) 露光装置
JPH06258182A (ja) 非球面レンズの偏芯測定方法及び装置
JP2593483B2 (ja) ＸＹθテーブルの初期設定方法
JPH06109481A (ja) コード板取付位置調整装置
CN119437647A (zh) 偏振器件透光轴标定装置及偏振器件透光轴标定方法
JPH08247739A (ja) ロータリーエンコーダパターンの測定装置及び測定方法
JPH04226012A (ja) 間隙設定方法
JPH04301713A (ja) 角度測定方法
JPH04110913U (ja) 角度測定装置
JPH0362013B2 (en])
JP2001209978A (ja) ディスクの位置決め方法
JP2004020481A (ja) カムプロフィール測定装置及びカムプロフィール測定方法